JPS63450Y2 - - Google Patents
Info
- Publication number
- JPS63450Y2 JPS63450Y2 JP1980039810U JP3981080U JPS63450Y2 JP S63450 Y2 JPS63450 Y2 JP S63450Y2 JP 1980039810 U JP1980039810 U JP 1980039810U JP 3981080 U JP3981080 U JP 3981080U JP S63450 Y2 JPS63450 Y2 JP S63450Y2
- Authority
- JP
- Japan
- Prior art keywords
- recording paper
- detection lever
- shaft
- contact
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Accessory Devices And Overall Control Thereof (AREA)
- Controlling Sheets Or Webs (AREA)
- Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980039810U JPS63450Y2 (en]) | 1980-03-26 | 1980-03-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980039810U JPS63450Y2 (en]) | 1980-03-26 | 1980-03-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56140451U JPS56140451U (en]) | 1981-10-23 |
JPS63450Y2 true JPS63450Y2 (en]) | 1988-01-07 |
Family
ID=29635249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1980039810U Expired JPS63450Y2 (en]) | 1980-03-26 | 1980-03-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63450Y2 (en]) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7552521B2 (en) | 2004-12-08 | 2009-06-30 | Tokyo Electron Limited | Method and apparatus for improved baffle plate |
US7560376B2 (en) | 2003-03-31 | 2009-07-14 | Tokyo Electron Limited | Method for adjoining adjacent coatings on a processing element |
US7566368B2 (en) | 2002-09-30 | 2009-07-28 | Tokyo Electron Limited | Method and apparatus for an improved upper electrode plate in a plasma processing system |
US7566379B2 (en) | 2002-09-30 | 2009-07-28 | Tokyo Electron Limited | Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system |
US7601242B2 (en) | 2005-01-11 | 2009-10-13 | Tokyo Electron Limited | Plasma processing system and baffle assembly for use in plasma processing system |
US8877002B2 (en) | 2002-11-28 | 2014-11-04 | Tokyo Electron Limited | Internal member of a plasma processing vessel |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5726763Y2 (en]) * | 1977-04-18 | 1982-06-10 | ||
JPS546496U (en]) * | 1977-06-17 | 1979-01-17 | ||
JPS54103910U (en]) * | 1977-12-28 | 1979-07-21 |
-
1980
- 1980-03-26 JP JP1980039810U patent/JPS63450Y2/ja not_active Expired
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7566368B2 (en) | 2002-09-30 | 2009-07-28 | Tokyo Electron Limited | Method and apparatus for an improved upper electrode plate in a plasma processing system |
US7566379B2 (en) | 2002-09-30 | 2009-07-28 | Tokyo Electron Limited | Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system |
US8877002B2 (en) | 2002-11-28 | 2014-11-04 | Tokyo Electron Limited | Internal member of a plasma processing vessel |
US7560376B2 (en) | 2003-03-31 | 2009-07-14 | Tokyo Electron Limited | Method for adjoining adjacent coatings on a processing element |
US7552521B2 (en) | 2004-12-08 | 2009-06-30 | Tokyo Electron Limited | Method and apparatus for improved baffle plate |
US7601242B2 (en) | 2005-01-11 | 2009-10-13 | Tokyo Electron Limited | Plasma processing system and baffle assembly for use in plasma processing system |
Also Published As
Publication number | Publication date |
---|---|
JPS56140451U (en]) | 1981-10-23 |
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